发明名称 Multi-point microprobe for testing integrated circuits
摘要 A multi-point probe for contacting closely spaced pads of a semiconductor device, having a flexible sheet-like member which carries the probes that make contact with the semiconductor device.
申请公布号 US4065717(A) 申请公布日期 1977.12.27
申请号 US19730380859 申请日期 1973.07.19
申请人 SIGNETICS CORPORATION 发明人 KATTNER, LIONEL E.;YOUMANS, ALBERT P.;SHASBY, PATRICK J.
分类号 G01R1/067;G01R1/073;(IPC1-7):G01R1/06;G01R31/26 主分类号 G01R1/067
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