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发明名称
SCAN TYPE ELECTRON MICROSCOPE
摘要
申请公布号
JPS52115162(A)
申请公布日期
1977.09.27
申请号
JP19760031302
申请日期
1976.03.24
申请人
HITACHI LTD
发明人
KANDA KIMIO
分类号
H01J37/22;H01J37/28
主分类号
H01J37/22
代理机构
代理人
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地址
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