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经营范围
发明名称
VACUUM EVAPORATION
摘要
申请公布号
JPS52113379(A)
申请公布日期
1977.09.22
申请号
JP19760029234
申请日期
1976.03.19
申请人
HITACHI LTD
发明人
MARUYAMA EIICHI;HIRAI TADAAKI;ISHIOKA YOSHIO;YAMAMOTO HIDEAKI;INAO KIYOHISA
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
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地址
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