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发明名称
LIQUID EPITAXIAL GROWING METHOD
摘要
申请公布号
JPS52109866(A)
申请公布日期
1977.09.14
申请号
JP19760025614
申请日期
1976.03.11
申请人
OKI ELECTRIC IND CO LTD
发明人
TAKANO HIROSHI
分类号
C30B19/00;C30B29/40;H01L21/208
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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