| 摘要 |
An apparatus for coating a substrate with a liquid resist film which includes vaporizable solvent components and solid components wherein the apparatus includes a high-voltage source for generating an electrostatic discharge in an aerosol, which is sprayed onto the substrate connected to the high-voltage source, as well as a dryer, through which the substrate passes, an ultrasonic generator, which is likewise connected to the high-voltage source and is in connection with an aerosol circuit. A coating solution is introduced into the aerosol circuit. The ultrasonic generator forms a unit with an atomizing space, and the drops of the coating solution are finely distributed into the latter. A fan is connected to the atomizing space and generates an air stream or gas stream, which forms with the drops of the coating solution, generated by the ultrasonic generator, the aerosol, which flows into a vaporization chamber. The vaporization chamber goes over into a fishtail die past which the substrate is vertically advanced. The dryer is arranged downstream of the fishtail die in the advancing direction A of the substrate.
|
