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发明名称
METHOD AND APPARATUS FOR REACTIVE SPUTTERING OF METAL ON A SUBSTRATE
摘要
申请公布号
IL52212(D0)
申请公布日期
1977.08.31
申请号
IL19770052212
申请日期
1977.06.01
申请人
UNIVERSITY OF SYDNEY
发明人
分类号
C23C14/06;C23C14/00;C23C14/24;C23C14/34;C23C14/50
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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