| 摘要 |
PURPOSE:To reduce a size and a cost with a simple structure by composing a parallel spring of a driving piezoelectric element and a detecting piezoelectric element. CONSTITUTION:A micro moving device which uses a parallel spring has a base 1 and a movable base 4, and is driven by a driver 6. The spring is composed of a driving piezoelectric element 2 and a detecting piezoelectric element 3, and a detection signal 6 and a drive signal 7 are transmitted to and received from the driver 5. |
