发明名称 Method of manufacturing an insulated gate type field effect semiconductor device
摘要 A method of manufacturing an insulated gate type field effect semiconductor device, wherein before an oxide film for the gate is formed, the surface portion of the silicon substrate is removed which includes defect such as scar, crack, distortion, dislocation or the like which tends to cause pin-holes to be formed in said oxide film.
申请公布号 US4039358(A) 申请公布日期 1977.08.02
申请号 US19760721211 申请日期 1976.09.08
申请人 TOKO INCORPORATED 发明人 KITAJIMA, MOTOHIRO;NAKAGAWA, YOSHIHIKO
分类号 H01L29/78;H01L21/28;H01L21/306;H01L21/316;H01L21/336;(IPC1-7):H01L21/22 主分类号 H01L29/78
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