CONTROLLING THE MOVEMENT OF A BEAM OF CHARGED PARTICLES,申请号GB19750000817-传众专利搜索

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发明名称	CONTROLLING THE MOVEMENT OF A BEAM OF CHARGED PARTICLES
摘要
申请公布号	GB1480561(A)	申请公布日期	1977.07.20
申请号	GB19750000817	申请日期	1975.01.08
申请人	IBM CORP	发明人
分类号	H05K3/00;H01J37/147;H01J37/304;H01J37/305;H01L21/027;(IPC1-7):G05D3/00;H01J37/30	主分类号	H05K3/00
代理机构		代理人
主权项
地址

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