| 摘要 |
PURPOSE:To eliminate the need for providing an independent aperture in addition to a laser window and simplify a device by providing an opening at a valve for intercepting laser gas so that its opening demarcates the cross sectional form of a laser beam in a state that a chamber is in direct communication with the laser window. CONSTITUTION:As a valve 4 for intercepting laser gas is provided between a chamber 1 which makes laser gas airtight and a laser window 5 which is provided on a laser light path, sealing of laser gas in the chamber 1 is maintained by closing the valve 4, for example, when the inside of the laser window 5 is cleaned. In this way, working is simplified and its simplification reduces the loss of laser gas. Further, the projection form of the laser beam direction in an opening of the valve 4 has a prescribed aperture form in a state that the valve is open and demarcates a sectional form of an outputted laser beam. As the opening itself of the valve 4, in this way, has the aperture form, it is unnecessary for its valve to prepare the aperture separately so as to demarcate the sectional form of the outputted laser beam. |
