发明名称 Shaped bodies and production of semiconductor material
摘要 A technique for producing one or more shaped bodies of semiconductor material using the steps of depositing a layer of the semiconductor material from the gas phase onto the outer surface of a heated, hollow carrier body, or onto the mutually remote surfaces of two carrier bodies spaced from one another, and thereafter removing the carrier body or bodies from the layer or layers so formed. Each carrier body is heated indirectly by a heater body located within said hollow carrier body, or between said spaced carrier bodies, and heated to a temperature above the deposition temperature of the semiconductor material.
申请公布号 US4034705(A) 申请公布日期 1977.07.12
申请号 US19750570040 申请日期 1975.04.21
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 DIETZE, WOLFGANG;KASPER, ANDREAS;RUCHA, ULRICH
分类号 C23C16/00;C23C16/22;C30B25/08;(IPC1-7):C23C13/08 主分类号 C23C16/00
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