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经营范围
发明名称
PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5250183(A)
申请公布日期
1977.04.21
申请号
JP19750125949
申请日期
1975.10.21
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
SHIMA SHIYOUHEI;HIGASHINAKAGAHA IWAO
分类号
H01L21/768;H01L21/28
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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