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发明名称
摘要
申请公布号
FR2276689(B1)
申请公布日期
1977.04.15
申请号
FR19750016538
申请日期
1975.05.21
申请人
IBM
发明人
分类号
G05D3/12;H01J37/304;H01L21/027;(IPC1-7):H01L21/00;G01B7/14;G06F15/20
主分类号
G05D3/12
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代理人
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地址
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