CHARGED PARTICLE BEAM LITHOGRAPHY METHOD,申请号JP19890243937-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM LITHOGRAPHY METHOD
摘要
申请公布号	JPH03106015(A)	申请公布日期	1991.05.02
申请号	JP19890243937	申请日期	1989.09.20
申请人	JEOL LTD	发明人	KOMAGATA TADASHI
分类号	H01L21/30;H01L21/027	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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