摘要 |
<p>Appts. for vacuum vapour deposition of coatings onto thin substrates employs a vacuum chamber contg. a vertical shaft on which a stack of horizontal arms, sepd. by bearings, is mounted. The substrates are located on the arms which are initially stacked in a zone which is not exposed to vapour in the chamber, and a motor located outside the chamber is used to successively swivel each arm so it is above an evaporator which uses a metal mask to restrict the path taken by the vapour. A controller pref. adjusts the evaporator to compensate for the different heights of the arms. The appts. is used esp. for vacuum metallisation, e.g. metallised plastic video discs, 30 cm dia. and read by reflection.</p> |