发明名称 MATERIAL DEFECT INSPECTING APPARATUS
摘要 PURPOSE:To light up a pattemed object of a sheet form to be inspected, then divide the light beam into two beams, reflected and transmitted, and measure the light at varying color-photo sensitivities through filters thereby detecting the defect of materials.
申请公布号 JPS5218387(A) 申请公布日期 1977.02.10
申请号 JP19750094433 申请日期 1975.08.01
申请人 TATEISI ELECTRONICS CO 发明人 OOHARA HIDEO
分类号 G01N21/89;G01N21/892;G01N21/956 主分类号 G01N21/89
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