| 发明名称 |
PATTERN PRINTING UNIT |
| 摘要 |
PURPOSE:To obtain a pattern printing unit which easily prints photo masks of large areas on the photo resist layers of wafers by the projection method. |
| 申请公布号 |
JPS5215266(A) |
申请公布日期 |
1977.02.04 |
| 申请号 |
JP19750090916 |
申请日期 |
1975.07.25 |
| 申请人 |
CANON KK |
发明人 |
KOMATA TAKASHI;MATSUMOTO KAZUYA;KANOU ICHIROU;SUZUKI AKIYOSHI |
| 分类号 |
H01L21/30;G03F7/20;H01L21/027 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 地址 |
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