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发明名称
VERFAHREN ZUR AUSBILDUNG EINES MUSTERS
摘要
申请公布号
DE2633947(A1)
申请公布日期
1977.02.03
申请号
DE19762633947
申请日期
1976.07.28
申请人
HITACHI,LTD.
发明人
KOBAYASHI,KEISUKE;KATOH,YOSHIKI;YONEZAWA,SEIJI
分类号
G03C1/725;G03C5/58;G03F7/004;H01L21/033;H01L21/314;(IPC1-7):G03C5/04
主分类号
G03C1/725
代理机构
代理人
主权项
地址
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