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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02151062(A)
申请公布日期
1990.06.11
申请号
JP19880305278
申请日期
1988.12.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
KISHIMOTO SATORU
分类号
H01L29/73;H01L21/331;H01L21/822;H01L27/04
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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