| 摘要 |
PURPOSE:To enable inclination to be calculated highly accurately and easily by scanning an acoustic lens for a sample, extracting detection signal which is formed by supersonic wave, and detecting strength distribution which is generated according to angle formed by a scanning plane and a sample plane. CONSTITUTION:A one-line selection circuit 12 of X and Y axes extracts detection signal which is formed by supersonic wave at least for each one line arbitrarily in direction of X and Y axes by scanning an acoustic lens 4 for a sample 6. Then, an inclination calculation circuit 13 detects strength distribution which is generated according to angle which is formed by a scanning surface of the lens 4 and a plane of the sample 6 by the extracted detection signal of one line, calculates three-dimensional inclination of the plane of the sample 6 from the result, and further provides an inclination correction circuit 14. Therefore, even if there are recessed and projection parts within a scanning line influence of inclination information to the calculation accuracy due to it can be reduced and data which does not greatly affect a part with less recessed and projecting parts on the plane of the sample 6, namely an interference fringe, can be extracted, thus enabling the inclination to be calculated highly accurately and easily and a stable inclination adjustment to be made. |
