METHOD AND DEVICE FOR ADJUSTING GROUP LENS

摘要

PROBLEM TO BE SOLVED: To provide an adjusting method and an adjusting device by which aberration is correctly detected without chipping a sharing interference pattern in the group lens adjustment of a diffracted light beam interference system. SOLUTION: In this system 100, the positional deviations Ux and Uy of condensing spots on photodetectors 136 and 144 are calculated, and lenses 108 and 110 are simultaneously moved by simultaneously driving adjusting mechanisnls 122 and 124 based on a result thereof, so that the interference pattern is positioned within the pupil surface of a condensing lens 112 by a controller 138.