| 摘要 |
PURPOSE:To suppress oxidation and to improve adhesive powder of a coating film in the ensuing stage, by repeatedly regulating the output of a power supply for heating by a signal from a vacuum gage set in a vacuum vessel to heat up while controlling a vacuum degree to a specified degree. CONSTITUTION:After a work is heated up by a heater 6 to a prescribed temp. in the vacuum vessel 3 provided with a discharge port 2, Ti, etc., housed in a water-cooled hearth 13 are melted and evaporated by an HCD gun 11 and a reaction gas 15 such as N2 is introduced into the vessel to coat a TiN film, etc., on the surface of the work 1. The power supply 5 for heating of the heater 6 is repeatedly regulated according to the signal from the vacuum gage 4 installed in the vacuum vessel 1 in the above-mentioned ion plating method. This regulation is executed by turning the output of the power supply 5 for heating on and off or increasing or decreasing said output at a high vacuum set value and low vacuum set value, respectively. The vacuum degree in the vacuum vessel 1 at the time of heating up is thereby controlled to the specified degree, by which the considerable deterioration in the vacuum degree by the gas generated at the time of the vacuum heating and the oxidation of the work 1 surface are suppressed.
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