发明名称 Roll to roll tester and method of testing flexible substrates roll to roll
摘要 An apparatus for testing of a plurality of electronic devices on a flexible substrate is described. The apparatus includes at least two rollers configured for guiding the flexible substrate into a testing area along transport direction, at least one prober configured for electrically contacting one or more of the electronic devices, at least one probing support configured for supporting a portion of the flexible substrate during electrical contact with the at least one prober, and a test device for functional testing of one or more of the electronic devices.
申请公布号 US9366696(B2) 申请公布日期 2016.06.14
申请号 US201114352043 申请日期 2011.10.19
申请人 Applied Materials, Inc. 发明人 Brunner Matthias
分类号 G01R31/20;G01R1/02;G09G3/00;G01R31/01 主分类号 G01R31/20
代理机构 Patterson & Sheridan, LLP 代理人 Patterson & Sheridan, LLP
主权项 1. An apparatus for testing of a plurality of electronic devices on a flexible substrate, comprising: at least one roller configured for guiding the flexible substrate in a testing area along a transport direction; at least one prober configured for electrically contacting one or more of the electronic devices; at least one probing support configured for supporting a portion of flexible substrate during electrically contacting with the at least one prober; and a test device for functional testing of one or more of the electronic devices, wherein the at least one prober is configured to stay in contact with contact pads on the flexible substrate while the flexible substrate is moving, wherein the contact pads are connected to the electronic devices to be tested, and wherein the at least one probing support is configured to move synchronized with the at least one prober.
地址 Santa Clara CA US