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发明名称
摘要
申请公布号	JP3406598(B2)	申请公布日期	2003.05.12
申请号	JP19930507335	申请日期	1992.09.17
申请人		发明人
分类号	H01L21/02;H01L21/18;H01L21/304;H01L21/306;H01L21/329;H01L21/78;(IPC1-7):H01L21/329	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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