| 发明名称 |
Method of manufacturing ferroelectric bismuth-titanate layers on a substrate from solution |
| 摘要 |
A method is described of manufacturing ferroelectric bismuth-titanate layers Bi4Ti3O12 on a substrate, A solution containing bismuth and titanium is provided, in a stoichiometric ratio, in the form of a metallo-organic or inorganic compound which is homogeneously mixed in an organic solvent, being brought into contact with the substrate and thermally treated at a temperature in the range from 500 DEG C. to 650 DEG C., thereby forming bismuth-titanate Bi4Ti3O12.
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| 申请公布号 |
US6007868(A) |
申请公布日期 |
1999.12.28 |
| 申请号 |
US19930151589 |
申请日期 |
1993.11.12 |
| 申请人 |
U.S. PHILIPS CORPORATION |
发明人 |
KLEE, MAREIKE;BRAND, WOLFGANG;VAN HAL, HENRICUS A.M. |
| 分类号 |
C23C18/12;H01G7/06;H01L21/28;H01L21/314;H01L21/316;(IPC1-7):B05D5/12 |
主分类号 |
C23C18/12 |
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