发明名称 |
Substrate processing apparatus |
摘要 |
A chemical supplied onto a substrate is contained in a chemical container. A chemical cooling unit keeps the chemical contained in the chemical container cooled to a proper temperature for storage. A chemical pressure-transferring portion causes the chemical to flow from the chemical container into a chemical introducing pipe. A chemical temperature controller portion changes the temperature of the chemical guided by the chemical introducing pipe to a proper temperature for application on a substrate. The chemical brought to the proper application temperature is guided to a chemical dispensing unit, which dispenses the chemical onto a substrate.
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申请公布号 |
US6007629(A) |
申请公布日期 |
1999.12.28 |
申请号 |
US19960770555 |
申请日期 |
1996.12.23 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
OHTANI, MASAMI;SASAKI, TADASHI |
分类号 |
B05C5/00;B05C11/08;B05C11/10;G03F7/16;G03F7/30;H01L21/027;H01L21/306;H01L21/31;H01L21/316;(IPC1-7):B05C11/10 |
主分类号 |
B05C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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