发明名称 |
A MEMS GAS CHROMATOGRAPH AND METHOD OF FORMING A SEPARATOR COLUMN FOR A MEMS GAS CHROMATOGRAPH |
摘要 |
A micro gas chromatograph includes one or more separator columns formed within a device layer. The separator columns have small channel cross sections and long channel lengths with atomic-smooth channel sidewalls enabling a high channel packaging density, multiple channels positioned on top of each other, and channel segments that are thermally decoupled from the substrates. The micro gas-chromatograph also enables electrostatic and thermal actuators to be positioned in close proximity to the separator columns such that the material passing through the columns is one or more of locally heated, locally cooled, and electrically biased. |
申请公布号 |
WO2016100504(A3) |
申请公布日期 |
2016.08.11 |
申请号 |
WO2015US66076 |
申请日期 |
2015.12.16 |
申请人 |
ROBERT BOSCH GMBH;FEYN, ANDO;O'BRIEN, GARY;KIM, BONGSANG;STEHLE, JOCHEN |
发明人 |
FEYN, ANDO;O'BRIEN, GARY;KIM, BONGSANG;STEHLE, JOCHEN |
分类号 |
G01N30/60;B81B7/00;B81C1/00 |
主分类号 |
G01N30/60 |
代理机构 |
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代理人 |
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主权项 |
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