CHARGED PARTICLE BEAM DEVICE, SAMPLE IMAGE ACQUISITION METHOD, AND PROGRAM RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To solve such a problem of a conventional method that when observing a sample in a non-vacuum atmosphere by an electron microscope, it is difficult to easily obtain an image of good quality, due to an effect that an electron beam is scattered by gas molecules in a non-vacuum space or a diaphragm isolating the non-vacuum space and a vacuum space.SOLUTION: A charged particle beam device includes a data processing section for removing an effect occurring in a spot shape of a primary charged particle beam being scattered before arriving at a sample from a signal of a detector. For example, the effect occurring in the spot shape of the primary charged particle beam by a fact that the primary charged particle beam is scattered by a diaphragm or gas existing in a non-vacuum space is removed from the signal acquired by the detector.SELECTED DRAWING: Figure 1