PELLICLE PROTECTED BY CONDUCTIVE FILM

摘要

PURPOSE:To effectively prevent the adhesion of dust to a mask by covering the aperture in the lower part of a supporting frame and an adhesive agent surface with a conductive film having specific volumetric resistance. CONSTITUTION:The aperture in the lower part of the supporting frame and the adhesive agent surface are covered by the conductive film. The conductive film is a high-polymer film having the volumetric resistance ranging 10<-2>-10<10>OMEGA.cm and is more preferably a high-polymer film having the electrical conductivity ranging 10<0>-10<8>OMEGA.cm. The more particularly preferable film as the high-polymer film having such electrical conductivity is the film formed by kneading conductive fillers therein and above all, the film formed by using a carbon black as a filler is inexpensive and is capable of providing the sufficient electrical conductivity. The electrification of the pellicle is thereby minimized and the adhesion of the dust thereon is prevented.