| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composition for pattern formation excellent in adhesion to a substrate such as a substrate for printed wiring formation, good in sensitivity, resolution and obtained pattern shape as well as in strippability from a support, and enabling a high-definition pattern to be formed, and to provide a pattern forming material obtained by using the composition, a pattern forming apparatus equipped with the pattern forming material, and a pattern forming method using the pattern forming material. <P>SOLUTION: The composition for pattern formation contains a compound having a functional group capable of causing chain transfer and a hydrophilic functional group within a molecule, a polymerization inhibitor, a binder, a polymerizable compound and a photopolymerization initiator. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
