发明名称 |
Substrate transport apparatus with multiple arms on a common axis of rotation |
摘要 |
A substrate transport apparatus having a drive section, two independently movable arm assemblies connected to the drive section on a common axis of rotation, and substrate holders connected to the arm assemblies. The drive section includes three coaxial drive shafts with a pulley connected to one of the shafts. The arm assemblies are connected to respective ones of the two other shafts.
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申请公布号 |
US6485250(B2) |
申请公布日期 |
2002.11.26 |
申请号 |
US19980223508 |
申请日期 |
1998.12.30 |
申请人 |
BROOKS AUTOMATION INC. |
发明人 |
HOFMEISTER CHRISTOPHER A. |
分类号 |
B25J9/04;B25J9/06;B25J15/00;B25J15/08;B25J17/00;B65G49/07;H01L21/677;(IPC1-7):B66C23/00 |
主分类号 |
B25J9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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