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发明名称
Method of controlled doping in an epitaxial vapor deposition process using a diluentgas
摘要
申请公布号
US3173814(A)
申请公布日期
1965.03.16
申请号
US19620168425
申请日期
1962.01.24
申请人
MOTOROLA, INC.
发明人
LAW JOHN TREVOR
分类号
C23C16/44;C30B25/02;H01L21/00;H01L21/205
主分类号
C23C16/44
代理机构
代理人
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地址
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