| 摘要 |
PURPOSE:To easily pressurize a work for a surface plate by jointing a revolution driving shaft and a work guide for press-holding a workpiece on a revolution surface plate through a bellows coupling and supporting the revolution driving shaft and the work guide by an air bearing, in a flow trap device. CONSTITUTION:Before the revolution operation, an air pressure introducing unit 1 and a revolution driving shaft 2 are set into noncontact state by supplying air into an air pressure introducing inlet 10, and the turning moment supplied from the revolution driving shaft 2 is transmitted to a work guide 4 having a plurality of works fixed on the lower part, through a bellows coupling 9, and also a standard guide ring 3 supported by a ball bearing 29 is revolved through a pin 25. When the pressure in the bellows coupling 9 is adjusted through a pressurization control port 12 by a speed controller 38. The work guide 4 air-bearing-supported by the air pocket parts 5-10 presses a work onto a revolving surface plate 28, and polishing is carried out. Therefore, the pressurization for the work onto the surface plate can be varied freely, and the polishing for the work can be carried out efficiently. |
