| 摘要 |
PURPOSE: A wafer carrier device completely removes a negative pressure at a wafer carrying completion time point, and easily separates the wafer. CONSTITUTION: A wafer carrier device has a reciprocating head. Many devices are vertically arranged on the head, and performs a vacuum absorption about the wafer(40). Many grooves(38) are formed to an outer part excepting a constant radius range of intake hole(34) formed on the body of the device. The body(30) is dome-contacted with a rear side of the wafer(40). Thereby, the wafer carrier device completely removes a negative pressure at a wafer carrying completion time point, easily separates the wafer, and reduces a wafer damage ration when carrying.
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