发明名称 OPTICAL SENSOR
摘要 An embodiment of the invention relates to an optical sensor for detecting chemical, biochemical or biological substances, the sensor comprising a laser and a semiconductor chip, wherein at least one photodetector and at least one high-contrast grating are monolithically integrated in said same chip,wherein the high-contrast grating is configured to optically couple radiation emitted by the laser into the photodetector, andwherein the coupling behaviour of said high-contrast grating depends on the optical properties of external substances that are brought near to or in contact with the high-contrast grating.
申请公布号 US2016161331(A1) 申请公布日期 2016.06.09
申请号 US201414559456 申请日期 2014.12.03
申请人 Technische Universität Berlin 发明人 LIU Anjin;HOFMANN Werner;BIMBERG Dieter
分类号 G01J1/04;G01N21/27;A61B5/1455;G01J1/42;H01L31/18;A61B5/145;G01N21/03;G01J1/08 主分类号 G01J1/04
代理机构 代理人
主权项 1. Optical sensor for detecting chemical, biochemical or biological substances, the sensor comprising a laser and a semiconductor chip, wherein at least one photodetector and at least one high-contrast grating are monolithically integrated in said same chip, wherein the high-contrast grating is configured to optically couple radiation emitted by the laser into the photodetector, and wherein the coupling behaviour of said high-contrast grating depends on the optical properties of external substances that are brought near to or in contact with the high-contrast grating.
地址 Berlin DE