| 摘要 |
PROBLEM TO BE SOLVED: To provide a FOUP opener where contaminations, generated from a sensor mechanism for detecting a semiconductor wafer received in the FOUP, are isolated from a wafer, the sensor mechanism is made compact, the footprint of the opener is made small, and the cost performance and yield are high. SOLUTION: In a FOUP opener 1 comprising at least a pot door 23 that has an attachment and detachment mechanism and a holding mechanism which a FOUP door 13 is attached/detached and held, a port door advance or retreat mechanism 40 for moving the port door 23 horizontally, and a port door up- down mechanism 50 for moving the port door 23 perpendicularly, a sensor advance or retreat mechanism 60 is provided at an up-down base member 51 of the port door up-down mechanism 50, a sensor securing member 62 is provided so as to elongate in the upward direction at the sensor advance or retreat mechanism 60, and a transmissive optical sensor 70 or a mapping sensor for detecting the existence, a stored state, and a stored position (height) of the wafer 14 in the FOUP is installed in the upper part of the sensor installing member 62. |
