| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical displacement gauge etc., suitable for measurement or contrasting the measurement object, the shape of which is different in terms of time. SOLUTION: An optical displacement gauge comprises a profile operation part capable of operating the profile shape of an object to be measured, based on the amplification signal obtained by the amplifier at each point in a first direction by the reflected light of the irradiation light from the light projection part; a display part capable of displaying the shape of profile of the measurement object operated in the profile operation part; and a memory part for storing the profile shape, operated in the profile operation part together with the obtained time information, wherein the past profile shapes stored in the memory part are displayed on the display part by calling back by designating the acquisition time, and as a result, a plurality of profile shapes can be constituted to be compared. Hence, the plurality of profiles, imaged at the different time can be displayed on the display part and the comparison and measurement, can be performed easily. COPYRIGHT: (C)2008,JPO&INPIT
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