发明名称 METHOD OF MANUFACTURING ACTIVE MATRIX SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a high-quality active matrix substrate excellent in reflectance characteristics at a low cost, without in-plane variations and lot-to-lot variations in reflectance characteristics. SOLUTION: First, as shown in (A), a TFT 8 is formed on an insulating substrate 1. Next, as shown in (B), an insulating film 9 is formed on the insulating substrate 1 and the TFT 8. Then, as shown in (C), a mold 10 having a predetermined surface pattern is pressed against the insulating film 9. Additionally, as shown in (D), a contact hole 11 is formed in the insulating film 9, and, as shown in (E), a reflective display electrode 12 is formed on the insulating film 9.
申请公布号 JP2002328387(A) 申请公布日期 2002.11.15
申请号 JP20010134392 申请日期 2001.05.01
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 TSUBOI NOBUYUKI;HIROSE TAKASHI;SAKURAI YOSHINOBU
分类号 G02F1/1333;G02F1/1335;G02F1/1343;G02F1/1362;G02F1/1368;G09F9/00;G09F9/30;G09F9/35;H01L29/786 主分类号 G02F1/1333
代理机构 代理人
主权项
地址