FORMING METHOD OF NITRIDE FILM,申请号JP19770101700-传众专利搜索

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发明名称	FORMING METHOD OF NITRIDE FILM
摘要
申请公布号	JPS5436179(A)	申请公布日期	1979.03.16
申请号	JP19770101700	申请日期	1977.08.26
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	SHIBAGAKI MASAHIRO;HORIIKE YASUHIRO;YAMAZAKI TAKASHI
分类号	H01L21/318	主分类号	H01L21/318
代理机构		代理人
主权项
地址

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