| 摘要 |
PURPOSE:To contrive to improve the yield of lens-loading and the mass productivity by a method wherein a lens is fixed at a part of an optical communication diode by superposing a lens-holding crystal, with lenses arranged in pyramidal form through holes, on a wafer for the optical communication diode. CONSTITUTION:An SiO2 42 is formed on an Si wafer 41, and a desired photo resist pattern 43 is formed thereon. Next, the photo resist is removed after etching the SiO2, then the Si wafer is etched with the SiO2 42 as a mask, thus forming the pyramid through holes 44, finally the SiO2 42 is etched, and then the lens-holding crystal provided with the pyramid through holes is obtained. The lens holding crystal 51 with spherical lenses 52 arranged in the through holes and a light emitting diode wafer 53 with a suitable amount of ultraviolet ray hardened resin dripped at positions for mounting the lenses are superposed on each other, which are then irradiated with ultraviolet rays 55, and thus the resin is hardened. Thereafter, the lens-holding crystal 51 is removed, resulting in completing a lens-loaded light emitting diode. |
