| 摘要 |
<p>PURPOSE:To provide a conveying device provided with a correcting function (centering function), by which a position of a wafer placed on a conveying carriage can be corrected in a stop position for the conveying carriage. CONSTITUTION:In a conveying device provided with a device 13 positioning a conveying carriage 1 carrying an object 33 to be conveyed in a stop position, a sensor 2 detecting a location of the object 33 to be conveyed is arranged in a stop position for the conveying carriage 1 used for transfer of the object 33 to be conveyed, while the conveying device is provided with a means, by which the stop position of the object 33 to be conveyed and a specific location for the object to be conveyed are compared with each other, the conveying carriage 1 is moved by actuating the positioning device 13 of the conveying carriage 1 so that the deviation between the predetermined location and the stop position for the object to be conveyed is eliminated, and the object 33 to be conveyed is moved to the specific stop position.</p> |
