Face-shear mode quartz crystal vibrators and method of manufacture

摘要

A miniaturized face-shear mode quartz crystal vibrator and method of manufacture is provided. The vibrator is formed from a Y-cut quartz crystal plate less than 500 mu m thick which has been rotated between 45 DEG to 55 DEG about the X-axis. A plurality of vibrators are formed by depositing a thin metallic film on the two opposed planar surfaces of the plate, selectively etching portions of the metallic films and dissolving the uncoated portions of the plate. The metallic films become the vibrator electrode.