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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE WITH CONSTANT WIDTH DEEP GROOVE ISOLATION
摘要
申请公布号
US5200348(A)
申请公布日期
1993.04.06
申请号
US19910801865
申请日期
1991.12.03
申请人
HATACHI, LTD.
发明人
UCHIDA, AKIHISA;OKADA, DAISUKE;TAKAKURA, TOSHIHIKO;OGIUE, KATSUMI;TAMAKI, YOICHI;KAWAMURA, MASAO
分类号
H01L21/316;H01L21/331;H01L21/76;H01L21/762;H01L21/763;H01L21/768;H01L23/522;H01L29/73
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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