POLISHING OR GRINDING METHOD AND DEVICE

摘要

PURPOSE:To prevent the polishing irregularities of a glass plate or the like by setting the rocking center position of a polishing member near the polished surface of a machined member. CONSTITUTION:A polishing member support mechanism 32 is constituted of four joint links 34, and the joint links 34 are connected to four corners of a support plate 36 and a grinding plate 10 respectively. Both end sections of the joint links 34 are connected to the support plate 36 and polishing plate 10 via joint members and supported rockably in any direction. Extension lines of the joint links 34 intersect at a virtual center point A on the center axis of the polishing plate 10. The virtual center point A is located slightly below the polishing surface of the polishing plate 10. The pressure distribution of the polishing surface of the polishing plate 10 can be set almost uniformly during grinding. The polishing plate 10 can be released so that the friction resistance applied to the polishing plate 10 is not increased, and the pressure distribution of the polishing surface can be maintained nearly uniform.