| 摘要 |
Disclosed are minute electromechanical devices (10, 11, 12), as electromagnetic actuators, pressure transducers, pumps and valves, which are conveniently fabricated from ceramic tape to yield monolithic ceramic and hybrid structures.
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| 申请人 |
THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA;BAU, HAIM, H.;SANTIAGO-AVILES, JORGE, J.;KIM, MOON;ANANTHASURESH, SURESH, G., K.;GONGORA-RUBIO, MARIO;LYNCH, HEATHER |
发明人 |
BAU, HAIM, H.;SANTIAGO-AVILES, JORGE, J.;KIM, MOON;ANANTHASURESH, SURESH, G., K.;GONGORA-RUBIO, MARIO;LYNCH, HEATHER |
