METHOD AND APPARATUS FOR IMPROVING PROBING OF DEVICES

摘要

A semiconductor device capable of sustaining a probing test of the type carried out during semiconductor device manufacture the device comprising a plurality of semiconductor layers (104) formed in accordance with a predetermined purpose of the device, the device comprising: a passivation layer (110) formed over the uppermost of the plurality of semiconductors layers; a metallic layer (120) to which bonds (126) may be attached and which includes at least one probing region (118) for carrying out said probing tests; characterised in that the metallic layer includes one or more discontinuities (122) in the surface thereof which act to dissipate any forces generated by a probe being applied thereto, such that the effective area over which the force is dissipated is greater than the area of the probe in contact therewith.