RF MATCHING UNIT

摘要

PURPOSE: An RF matching unit is provided to control easily inductance and lengthen a lifetime by improving performance of inductors used for the RF matching unit. CONSTITUTION: An RF matching unit(1) has a variable inductor(45). The variable inductor(45) is formed with an invariable capacitor(3), a variable capacitor(2), a rotating inductor(4), and a fixed inductor(5). An RF source transmits RF energy to a process chamber through the variable capacitor(2), the fixed inductor(5), the rotating inductor(4), the invariable capacitor(3), and an output terminal(8). A value of capacitance of the variable capacitor(2) is controlled by a method used in an existing variable inductor. The fixed inductor(5) is connected electrically with the rotating inductor(4) by using inductive current. A rotating angle of the rotating inductor(4) is controlled by a controller of the RF matching unit(1).