Non-volatile programmable optical element with absorption coefficient modulation

摘要

A non-volatile programmable electro-optical element alters absorption characteristics of an optical medium that comprises a transition metal oxide material by electrostatically moving oxygen vacancies into or out of the regions containing a wavefunction of an optical beam. A specific oxygen vacancy profile in the transition metal oxide material may be programmed into the optical medium. The oxygen vacancy profile alters an absorption profile within the optical medium. Once the absorption profile is set by an electrical signal, the optical element maintains its state even when the electrical signal is turned off. Thus, the programming node may be disconnected from a power supply network, thereby enabling a low power operation of the electro-optical element. Amorphous transition-metal oxides enable integration into back-end-of-line (BEOL) interconnect structures and do not have birefringence. The inventive electro-optical element may be employed for both the visible and the infrared wavelength spectrum.