| 摘要 |
<p>PURPOSE:To control the concn. of nitrogen gas to be separated and supplied to a desired range in the separation of the nitrogen gas. CONSTITUTION:Raw material gas containing at least oxygen gas in addition to nitrogen gas is sent into adsorbent tanks 19, 20 packed with an adsorbent and the oxygen gas is adsorbed by the adsorbent to separate the nitrogen gas from the raw material gas and the nitrogen gas with a desired concn. range is stored in a product tank 21. The concn. of the nitrogen gas in the product tank 21 is measured and, when the concn. of the nitrogen gas becomes higher than a predetermined range of the concn. within the desired range, the raw material gas is sent into the product tank 21. When said concn. becomes low, the supply of the raw material gas is stopped. The sending-in amount of the raw material gas can be gradually increased.</p> |
