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发明名称
VERFAHREN ZUR DOTIERUNG EINER ISOLATIONSSCHICHT
摘要
申请公布号
DE2308803(A1)
申请公布日期
1974.08.29
申请号
DE19732308803
申请日期
1973.02.22
申请人
SIEMENS AG
发明人
GOETZBERGER,ADOLF,PROF.DIPL.-PHYS.DR.;KELLNER,WALTER,DR.PHIL.
分类号
H01L29/73;H01L21/265;H01L21/31;H01L21/3115;H01L21/331;H01L23/29;H01L29/06;(IPC1-7):H01L7/54
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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